2024-2025 Course Catalog

VACT 1294 Rough Vacuum Equipment

Vacuum technology is the field whereby very low-pressure environments are created, maintained and analyzed, such as those needed in the fields of semiconductor manufacturing, glass coating and research.  VACT 1294 covers the pump-down performance of rough vacuum systems based on the process of positive displacement. System conductance and pump-down performance are affected by the selection of the specific vacuum hardware component types, such as pumps, pressure gauges, valves, and chambers.

Credits

1 cr

Prerequisite

VACT 1293

Offered

Fall, Spring